Micro gas-flow sensor with integrated heat sink and flow guide

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 547-551

  Qiu, Li ^a   Hein, Stefan ^a   Obermeier, Ernst ^a   Schubert, Axel ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b Auergesellschaft GmbH   (Germany)

Author keywords

ANSYS FLOTRAN; FEM simulations; Flow guides; Heat sinks; Micro gas flow sensors

Indexed keywords

EID: 0000733450     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80012-X     Document Type: Article

References (5)

1. T.R. Ohnstein et al., Environmentally rugged, wide dynamic range microstructure airflow sensor, Tech. Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, 1990, pp. 158-160.
2. G.B. Hocker, R.G. Johnson, R.E. Higashi and P.J. Bohrer, A microtransducer for air flow and differential pressure sensing applications, in R.S. Muller et al. (eds.), Microsensors, IEEE Press, New York, 1991, pp. 242-245.
3. G. Wachutka, R. Lenggenhager, D. Moser and H. Baltes, Analytical 2D-model of CMOS micromachined gas flow sensors, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24-28 June, 1991, pp. 22-25.
4. N.R. Stewart and A. Nathan, Flow-rate microsensor modeling and optimization, Sensors and Actuators A, 34 (1992) 109-122.
5. K. Petersen, J. Brown and W. Renken, High-precision, high-performance mass flow sensor with integrated laminar flow microchannels, Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, USA, 11-14 June, 1985, pp. 361-363.