A lift-force flow sensor designed for acceleration insensitivity

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 263-268

  Svedin, Niklas ^a   Kälvesten, Edvard ^a   Stemme, Erik ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Gas flow sensors; Lift force; Piezoresistive

Indexed keywords

ACCELERATION; FLOW OF FLUIDS; LOADS (FORCES); PIEZOELECTRICITY; PRESSURE DROP;

ACCELERATION INSENSITIVITY; FLOW SENSITIVITY; LIFT FORCE FLOW SENSOR; POLYSILICON PIEZORESISTORS;

SILICON SENSORS;

EID: 0042638153     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00015-6     Document Type: Article

References (4)

1. Y. Su, A.G.R. Evans, A. Brunnschweiler, Micromachined silicon cantilever paddles for flow sensors, paper presented at MME '95, Copenhagen, Denmark, 1995.
2. A.J. van der Wiel, M.A. Boillat, N.F. de Rooij, A bi-directional silicon orifice sensor characterised for fluid temperature and pressure, paper presented at 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995.
3. N. Svedin, E. Stemme, G. Stemme, A new bi-directional gas-flow sensor based on lift force, paper presented at 9th Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA, 16-19 June, 1997.
4. J.D. Anderson, Fundamentals of Aerodynamics, 2nd edn. McGraw-Hill, New York, 1991.