An integrated pressure-flow sensor for correlation measurements in turbulent gas flows

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 51-58

  Kälvesten, Edvard ^a   Vieider, Christian ^b   Löfdahl, Lennart ^c   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b ACREO AB   (Sweden)

^c CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Flow sensors; Pressure sensors; Turbulence

Indexed keywords

BOUNDARY LAYERS; FLOW MEASUREMENT; FREQUENCY RESPONSE; GAS DYNAMICS; SHEAR STRESS; TURBULENT FLOW;

INTEGRATED PRESSURE FLOW SENSORS; POLYSILICON DIAPHRAGM TECHNOLOGY;

SENSORS;

EID: 0030100701     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80125-7     Document Type: Article

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