Modeling two-dimensional solid-phase epitaxial regrowth using level set methods

Journal of Applied Physics

Volumn 105, Issue 5, 2009, Pages

  Morarka, S ^a   Rudawski, N G ^a   Law, M E ^a   Jones, K S ^a   Elliman, R G ^b  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; LEVEL MEASUREMENT; MOLECULAR BEAM EPITAXY; PHASE INTERFACES; SEMICONDUCTING SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; TWO DIMENSIONAL; VELOCITY;

CRYSTALLOGRAPHIC ORIENTATIONS; EDGE DEFECTS; EPITAXIAL CRYSTALLIZATIONS; EPITAXIAL RECRYSTALLIZATION; FLORIDA; LEVEL SET METHODS; LEVEL-SET TECHNIQUES; OBJECT ORIENTED; ORIENTATION DEPENDENCES; PATTERNED MATERIALS; REGROWTH INTERFACES; SOLID-PHASE; SOLID-PHASE EPITAXIAL GROWTHS; SOLID-PHASE EPITAXIAL REGROWTHS; SOLID-PHASE EPITAXIES; STABLE MODELS;

EPITAXIAL GROWTH;

EID: 62549166697     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3082086     Document Type: Article

References (49)

1. A. Bousetta, J. A. Vandenberg, R. Valizadeh, D. G. Armour, and P. C. Zalm, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/0168-583X(91)96231-9 55, 565 (1991).
2. J. J. Hamilton, E. J. H. Collart, B. Colombeau, C. Jeynes, M. Bersani, D. Giubertoni, J. A. Sharp, N. E. B. Cowern, and K. J. Kirkby, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/j.nimb.2005.04.112 237, 107 (2005).
3. P. Morin, E. Mastromatteo, C. Chaton, C. Ortolland, and F. Arnaud, Mater. Sci. Eng., B 0921-5107 10.1016/j.mseb.2006.08.008 135, 215 (2006).
4. K. Ota, K. Sugihara, H. Sayama, T. Uchida, H. Oda, T. Eimori, H. Morimoto and Y. Inoue, Tech. Dig.-Int. Electron Devices Meet. 2002, 27.
5. G. A. Olson and J. A. Roth, Mater. Sci. Rep. 0920-2307 10.1016/S0920-2307(88)80005-7 3, 1 (1988).
6. J. A. Roth, G. L. Olson, D. C. Jacobson, and J. M. Poate, Appl. Phys. Lett. 0003-6951 10.1063/1.103477 57, 1340 (1990).
7. L. Csepregi, E. F. Kennedy, J. W. Mayer, and T. W. Sigmon, J. Appl. Phys. 0021-8979 10.1063/1.325397 49, 3906 (1978).
8. L. Csepregi, E. F. Kennedy, T. J. Gallagher, J. W. Mayer, and T. W. Sigmon, Appl. Phys. (Berlin)48, 4234 (1977). 0340-3793
9. E. F. Kennedy, L. Csepregi, J. W. Mayer, and T. W. Sigmon, J. Appl. Phys. 0021-8979 10.1063/1.323409 48, 4241 (1977).
10. I. Suni, G. Göltz, M. G. Grimaldi, M. -A. Nicolet, and S. S. Lau, Appl. Phys. Lett. 0003-6951 10.1063/1.93034 40, 269 (1982).
11. J. S. Williams and R. G. Elliman, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.51.1069 51, 1069 (1983).
12. W. O. Adekoya, M. Hage-Ali, J. C. Muller, and P. Siffert, J. Appl. Phys. 0021-8979 10.1063/1.341959 64, 666 (1988).
13. J. C. McCallum, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/S0168-583X(98)00671-5 148, 350 (1999).
14. B. C. Ishitani and J. C. McCallum, Phys. Rev. B 0163-1829 10.1103/PhysRevB.76.045206 76, 045206 (2007).
15. E. Nygren, M. J. Aziz, and D. Turnbull, Appl. Phys. Lett. 0003-6951 10.1063/1.96228 47, 232 (1985).
16. G. -Q. Lu, E. Nygren, M. J. Aziz, D. Turnbull, and C. W. White, Appl. Phys. Lett. 0003-6951 10.1063/1.101056 54, 2583 (1989).
17. G. -Q. Lu, E. Nygren, and M. J. Aziz, J. Appl. Phys. 70, 5232 (1991). 0021-8979
18. T. K. Chaki, Philos. Mag. Lett. 0950-0839 10.1080/09500839108206372 63, 303 (1991).
19. K. L. Saenger, K. E. Fogel, J. A. Ott, J. P. de Souza, and C. E. Murray, Appl. Phys. Lett. 0003-6951 10.1063/1.2902291 92, 124103 (2008).
20. M. J. Aziz, P. C. Sabin, and G. -Q. Lu, Phys. Rev. B 0163-1829 10.1103/PhysRevB.44.9812 44, 9812 (1991).
21. W. Barvosa-Carter and M. J. Aziz, Appl. Phys. Lett. 0003-6951 10.1063/1.1386399 79, 356 (2001).
22. W. Barvosa-Carter, M. J. Aziz, A. -V. Phan, T. Kaplan, and L. J. Gray, J. Appl. Phys. 0021-8979 10.1063/1.1790580 96, 5462 (2004).
23. W. Barvosa-Carter, M. J. Aziz, L. J. Gray, and T. Kaplan, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.81.1445 81, 1445 (1998).
24. J. F. Sage, W. Barvosa-Carter, and M. J. Aziz, Appl. Phys. Lett. 0003-6951 10.1063/1.127029 77, 516 (2000).
25. N. G. Rudawski, K. S. Jones, and R. Gwilliam, Appl. Phys. Lett. 0003-6951 10.1063/1.2801518 91, 172103 (2007).
26. N. G. Rudawski, K. S. Jones, and R. Gwilliam, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.100.165501 100, 165501 (2008).
27. N. G. Rudawski, K. S. Jones, and R. Gwilliam Mater. Sci. Eng. R. 0927-796X 10.1016/j.mser.2008.02.002 61, 40 (2008).
28. N. G. Rudawski, K. S. Jones, and R. Gwilliam, Appl. Phys. Lett. 0003-6951 10.1063/1.2945291 92, 232110 (2008).
29. N. G. Rudawski, K. S. Jones, and R. Gwilliam, J. Mater. Res. 24. 305 (2009).
30. N. Burbure, N. G. Rudawski, and K. S. Jones, Electrochem. Solid-State Lett. 1099-0062 10.1149/1.2719597 10, H184 (2007).
31. H. Cerva and K. -H. Küsters, J. Appl. Phys. 0021-8979 10.1063/1.343832 66, 4723 (1989).
32. H. Cerva and W. Bergholz, J. Electrochem. Soc. 0013-4651 10.1149/1.2056158 140, 780 (1993).
33. H. Cerva, Defect Diffus. Forum 148, 103 (1997). 0015-8321
34. Y. G. Shin, J. Y. Lee, M. H. Park, and H. K. Kang, J. Cryst. Growth 0022-0248 10.1016/S0022-0248(01)01630-X 233, 673 (2001).
35. Y. G. Shin, J. Y. Lee, M. H. Park, and H. K. Kang, J. Cryst. Growth 231, 107 (2001). 0022-0248
36. Y. G. Shin, J. Y. Lee, M. H. Park, and H. K. Kang, Jpn. J. Appl. Phys. 40, 6192 (2001). 0021-4922
37. C. Ross and K. S. Jones, Mater. Res. Soc. Symp. Proc. 810, C10.4 (2004).
38. C. R. Olson, E. Kuryliw, B. E. Jones, and K. S. Jones, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2162566 24, 446 (2006).
39. N. G. Rudawski, K. N. Siebein, and K. S. Jones, Appl. Phys. Lett. 0003-6951 10.1063/1.2337994 89, 082107 (2006).
40. N. G. Rudawski, K. S. Jones, and R. G. Elliman, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2775459 26, 435 (2008).
41. N. G. Rudawski, K. S. Jones, S. Morarka, M. E. Law, and R. G. Elliman, J. Appl. Phys. (submitted).
42. K. L. Saenger, J. P. de Souza, K. E. Fogel, J. A. Ott, C. Y. Sung, D. K. Sadana, and H. Yin, J. Appl. Phys. 0021-8979 10.1063/1.2736343 101, 104908 (2007).
43. A. -V. Phan, T. Kaplan, L. J. Gray, D. Adalsteinsson, J. A. Sethian, W. Barvosa-Carter, and M. J. Aziz, Modell. Simul. Mater. Sci. Eng. 9, 309 (2001). 0965-0393
44. M. E. Law and S. M. Cea, Comput. Mater. Sci. 0927-0256 10.1016/S0927-0256(98)00020-2 12, 289 (1998).
45. J. A. Sethian, Level Set Methods and Fast Marching Methods (Cambridge University Press, New York, 1999).
46. S. Morarka, N. G. Rudawski, and M. E. Law, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2823063 26, 357 (2008).
47. B. Drosd and J. Washburn, J. Appl. Phys. 51, 4106 (1980).
48. N. Bernstein, M. J. Aziz, and E. Kaxiras, Phys. Rev. B 0163-1829 10.1103/PhysRevB.58.4579 58, 4579 (1998).
49. F. Spaepen, Acta Metall. 0001-6160 10.1016/0001-6160(78)90145-1 26, 1167 (1978).