Level set modeling of the orientation dependence of solid phase epitaxial regrowth

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 1, 2008, Pages 357-361

  Morarka, Saurabh ^a   Rudawski, N G ^a   Law, Mark E ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LEVEL SET METHODS; ORIENTATION DEPENDENCE; PINCHING CORNERS; SCALED DEVICES;

COMPUTER SIMULATION; CRYSTAL ORIENTATION; ETCHING; INTERFACES (MATERIALS); POLYNOMIALS; TRANSMISSION ELECTRON MICROSCOPY;

EPITAXIAL GROWTH;

EID: 38849198037     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2823063     Document Type: Article

References (8)

1. G. A. Olson and J. A. Roth, Mater. Sci. Rep. MSREEL 0920-2307 10.1016/S0920-2307(88)80005-7 3, 1 (1988).
2. A.-V. Phan, T. Kaplan, L. J. Gray, D. Adalsteinsson, J. A. Sethian, W. Barvosa-Carter, and M. J. Aziz, Modell. Simul. Mater. Sci. Eng. MSMEEU 0965-0393 9, 309 (2001).
3. L. Csepregi, E. F. Kennedy, J. W. Mayer, and T. W. Sigmon, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.325397 49, 3906 (1978).
4. N. G. Rudawski, K. N. Siebein, and K. S. Jones, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2337994 89, 082107 (2006).
5. K. L. Saenger, J. P. de Souza, K. E. Fogel, J. A. Ott, C. Y. Sung, D. K. Sadana, and H. Yin, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2426924 101, 024908 (2007).
6. J. A. Sethian, Level Set Methods and Fast Marching Methods (Cambridge University Press, New York, 1999).
7. J. A. Sethian, in Numerical Methods for Propagating Fronts in Variational Methods for Free Surface Interfaces, edited by, P. Concus, and, R. Finn, (Springer, New York, 1987).
8. J. M. Jacques, L. S. Robertson, K. S. Jones, M. E. Law, M. J. Rendon, and J. Bennett, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1576508 82, 3469 (2003).