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Volumn 91, Issue 17, 2007, Pages
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Solid phase epitaxy in uniaxially stressed (001) Si
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTAL ORIENTATION;
CRYSTALLITES;
CRYSTALLIZATION;
EPITAXIAL GROWTH;
DEFECT FORMATION;
EPITAXIAL REGROWTH VELOCITY;
SOLID PHASE EPITAXY;
AMORPHOUS SILICON;
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EID: 35549006723
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2801518 Document Type: Article |
Times cited : (17)
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References (16)
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