Analysis of dielectric constants to determine sp3/sp2 ratio and effect of substrate bias on spectroscopic ellipsometric studies of tetrahedral amorphous carbon films grown using an S bend filtered cathodic vacuum arc process

Indian Journal of Pure and Applied Physics

Volumn 47, Issue 2, 2009, Pages 141-148

  Panwar, O S ^a   Khan, Mohd Alim ^a   Basu, A ^a   Kumar, Satyendra ^b   Kumar, Sushil ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

Author keywords

FCVA; Optical constants; Sp3 sp 2; Spectroscopic ellipsometry; Substrate bias; ta C

Indexed keywords

EID: 62549146177     PISSN: 00195596     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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