SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 675, Issue , 2001, Pages

Effect of metal back contacts on tetrahedral amorphous carbon films grown using the cathodic arc process

(4) Satyanarayana, B S a Takahashi, H a Narusawa, T a Hiraki, A a

a SUPERCONDUCTIVITY RESEARCH LABORATORY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CRYSTAL STRUCTURE; DEPOSITION; ELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; ELECTRON EMISSION; FILM GROWTH; METALS; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SUBSTRATES;

CATHODIC ARC PROCESS; METAL BACK CONTACTS; PULSED CATHODIC ARC SYSTEM; TETRAHEDRAL AMORPHOUS CARBON FILMS;

CARBON;

EID: 0035742233 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (9)

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