On the determination of the sp3 to sp2 ratio in diamond-like carbon thin films

Thin Solid Films

Volumn 302, Issue 1-2, 1997, Pages 250-255

  Mahajan, Somna S ^a   Barshilia, H C ^a   Mehta, B R ^a   Vankar, V D ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Carbon; Chemical vapour deposition; Ellipsometry: Optical properties

Indexed keywords

ATOMS; CARRIER CONCENTRATION; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; CURVE FITTING; ELECTRON ENERGY LEVELS; ELLIPSOMETRY; HYDROGEN; OPTICAL PROPERTIES; THIN FILMS;

SPECTROSCOPIC ELLIPSOMETRY;

DIAMOND FILMS;

EID: 0031163351     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09519-3     Document Type: Article

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