Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs

IEEE Transactions on Plasma Science

Volumn 29, Issue 5 I, 2001, Pages 768-775

  Anders, André ^a,b   Fong, Walton ^c   Kulkarni, Ashok V ^d   Ryan, Francis W ^e   Singh Bhatia, C ^a,b  

^a IEEE   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d WESTERN DIGITAL CORPORATION   (United States)

^e IBM   (United States)

Author keywords

Carbon overcoats; Cathodic vacuum arc; Diamond like carbon; Macroparticle filtering; Magnetic storage

Indexed keywords

CARBON VACUUM ARCS; MACROPARTICLE; OVERCOATS; PLASMA FILTERS; TWIST FILTER SYSTEM; ULTRATHIN DIAMOND LIKE CARBON FILMS;

CORROSION RESISTANCE; DEPOSITION; ELASTIC MODULI; ELECTRIC ARCS; HARDNESS; MAGNETIC FIELDS; MAGNETIC STORAGE; PARTICLES (PARTICULATE MATTER); PLASMA DEVICES; ULTRATHIN FILMS; VACUUM APPLICATIONS; WEAR OF MATERIALS;

DIAMOND LIKE CARBON FILMS;

EID: 0035485762     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.964472     Document Type: Article

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