Spectroscopic ellipsometric study of tetrahedral amorphous carbon films: Optical properties and modelling

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1132-1136

  Canillas, A ^a   Polo, M C ^a   Andujar J L ^a   Sancho, J ^a   Bosch, S ^a   Robertson, J ^b   Milne, W I ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Optical properties; Spectroscopic ellipsometry; Tetrahedral amorphous carbon

Indexed keywords

ELLIPSOMETRY; ION BOMBARDMENT; OPTICAL PROPERTIES; REFLECTION; SILICON;

ABSORBENT DISPERSION;

THIN FILMS;

DIAMOND-LIKE CARBON;

EID: 0035269454     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00551-3     Document Type: Article

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