Optical properties of MOCVD HfO 2 films

Physica Status Solidi (A) Applications and Materials Science

Volumn 206, Issue 2, 2009, Pages 281-286

  Ayupov, Boris ^a   Zherikova, Kseniya ^a   Gelfond, Nikolai ^a   Morozova, Natalia ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

MOCVD; NULL ELLIPSOMETRIES; OPTICAL MODELS; VERTICAL REACTORS;

CHEMICAL VAPOR DEPOSITION; HAFNIUM; OPTICAL PROPERTIES;

HAFNIUM COMPOUNDS;

EID: 62549097272     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200824250     Document Type: Conference Paper

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