Determination of optical properties variation of silicon and glass surfaces after mechanical and plasma treatments by monochromatic ellipsometry

Optik (Jena)

Volumn 109, Issue 4, 1998, Pages 145-149

  Ayupov, B M ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ELLIPSOMETRY; GLASS; INVERSE PROBLEMS; MATHEMATICAL MODELS; OPTICAL PROPERTIES; PLASMA APPLICATIONS; SILICON;

MONOCHROMATIC ELLIPSOMETRY;

SURFACE TREATMENT;

EID: 0032302879     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

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