메뉴 건너뛰기




Volumn 4, Issue 3, 2009, Pages 153-157

Infrared nanoscopy of strained semiconductors

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC PROPERTIES; GEOMETRICAL OPTICS; MAPPING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SILICON CARBIDE;

EID: 62249144307     PISSN: 17483387     EISSN: 17483395     Source Type: Journal    
DOI: 10.1038/nnano.2008.399     Document Type: Article
Times cited : (105)

References (30)
  • 1
    • 0037317524 scopus 로고    scopus 로고
    • The development of grain-orientation-dependent residual stress in a cyclically deformed alloy
    • Wang, Y. D. et al. The development of grain-orientation-dependent residual stress in a cyclically deformed alloy. Nature Mater. 2, 101-106 (2003).
    • (2003) Nature Mater , vol.2 , pp. 101-106
    • Wang, Y.D.1
  • 3
    • 10844253101 scopus 로고    scopus 로고
    • Silicon device scaling to the sub-10-nm regime
    • Ieong, M., Doris, B., Kedzierski, J., Rim, K. & Yang, M. Silicon device scaling to the sub-10-nm regime. Science 306, 2057-2060 (2004).
    • (2004) Science , vol.306 , pp. 2057-2060
    • Ieong, M.1    Doris, B.2    Kedzierski, J.3    Rim, K.4    Yang, M.5
  • 4
    • 33846823034 scopus 로고    scopus 로고
    • Technology and metrology of new electronic materials and devices
    • Vogel, E. M. Technology and metrology of new electronic materials and devices. Nature Nanotech. 2, 25-32 (2007).
    • (2007) Nature Nanotech , vol.2 , pp. 25-32
    • Vogel, E.M.1
  • 5
    • 45749105563 scopus 로고    scopus 로고
    • Nanoscale holographic interferometry for strain measurements in electronic devices
    • Hytch, M., Houdellier, F., Hüe, F. & Snoeck, E. Nanoscale holographic interferometry for strain measurements in electronic devices. Nature 453, 1086-1089 (2008).
    • (2008) Nature , vol.453 , pp. 1086-1089
    • Hytch, M.1    Houdellier, F.2    Hüe, F.3    Snoeck, E.4
  • 6
    • 0037062964 scopus 로고    scopus 로고
    • Phonon-enhanced light-matter interaction at the nanometre scale
    • Hillenbrand, R., Taubner, T. & Keilmann, F. Phonon-enhanced light-matter interaction at the nanometre scale. Nature 418, 159-162 (2002).
    • (2002) Nature , vol.418 , pp. 159-162
    • Hillenbrand, R.1    Taubner, T.2    Keilmann, F.3
  • 7
    • 79956030875 scopus 로고    scopus 로고
    • High spatial resolution grain orientation and strain mapping in thin films using polychromatic submicron X-ray diffraction
    • Tamura, N. et al. High spatial resolution grain orientation and strain mapping in thin films using polychromatic submicron X-ray diffraction. Appl. Phys. Lett. 80, 3724-3726 (2002).
    • (2002) Appl. Phys. Lett , vol.80 , pp. 3724-3726
    • Tamura, N.1
  • 8
    • 29144448064 scopus 로고    scopus 로고
    • Methods of piezo-spectroscopic calibration of thin film materials: II. Tensile stress field at indentation crack tip
    • Zhu,W. L.,Wan, K. S. & Pezzotti, G. Methods of piezo-spectroscopic calibration of thin film materials: II. Tensile stress field at indentation crack tip. Meas. Sci. Technol. 17, 191-198 (2006).
    • (2006) Meas. Sci. Technol , vol.17 , pp. 191-198
    • Zhu, W.L.1    Wan, K.S.2    Pezzotti, G.3
  • 9
    • 0001552189 scopus 로고
    • Silicon-silicon dioxide interface - an infrared study
    • Boyd, I. W. & Wilson, J. I. B. Silicon-silicon dioxide interface - an infrared study. J. Appl. Phys. 62, 3195-3200 (1987).
    • (1987) J. Appl. Phys , vol.62 , pp. 3195-3200
    • Boyd, I.W.1    Wilson, J.I.B.2
  • 10
    • 34047174569 scopus 로고    scopus 로고
    • Grain orientation, texture and internal stress optically evaluated by micro-Raman spectroscopy
    • Becker, M., Scheel, H., Christiansen, S. & Strunk, H. P. Grain orientation, texture and internal stress optically evaluated by micro-Raman spectroscopy. J. Appl. Phys. 101, 063531 (2007).
    • (2007) J. Appl. Phys , vol.101 , pp. 063531
    • Becker, M.1    Scheel, H.2    Christiansen, S.3    Strunk, H.P.4
  • 12
    • 33748518192 scopus 로고    scopus 로고
    • Pseudoheterodyne detection for background-free near-field spectroscopy
    • Ocelic, N., Huber, A. & Hillenbrand, R. Pseudoheterodyne detection for background-free near-field spectroscopy. Appl. Phys. Lett. 89, 101124 (2006).
    • (2006) Appl. Phys. Lett , vol.89 , pp. 101124
    • Ocelic, N.1    Huber, A.2    Hillenbrand, R.3
  • 13
    • 4444249563 scopus 로고    scopus 로고
    • Subwavelength-scale tailoring of surface phonon polaritons by focused ion-beam implantation
    • Ocelic, N. & Hillenbrand, R. Subwavelength-scale tailoring of surface phonon polaritons by focused ion-beam implantation. Nature Mater. 3, 606-609 (2004).
    • (2004) Nature Mater , vol.3 , pp. 606-609
    • Ocelic, N.1    Hillenbrand, R.2
  • 14
    • 33646434821 scopus 로고    scopus 로고
    • Nanoscale resolved infrared probing of crystal structure and of plasmon-phonon coupling
    • Huber, A., Ocelic, N., Taubner, T. & Hillenbrand, R. Nanoscale resolved infrared probing of crystal structure and of plasmon-phonon coupling. Nano Lett. 6, 774-778 (2006).
    • (2006) Nano Lett , vol.6 , pp. 774-778
    • Huber, A.1    Ocelic, N.2    Taubner, T.3    Hillenbrand, R.4
  • 15
    • 34548651355 scopus 로고    scopus 로고
    • Simultaneous IR material recognition and conductivity mapping by nanoscale near-field microscopy
    • Huber, A. J., Kazantsev, D., Keilmann, F., Wittborn, J. & Hillenbrand, R. Simultaneous IR material recognition and conductivity mapping by nanoscale near-field microscopy. Adv. Mater. 19, 2209-2212 (2007).
    • (2007) Adv. Mater , vol.19 , pp. 2209-2212
    • Huber, A.J.1    Kazantsev, D.2    Keilmann, F.3    Wittborn, J.4    Hillenbrand, R.5
  • 16
    • 0000274050 scopus 로고    scopus 로고
    • Nanoscale chemical analysis by tip-enhanced Raman spectroscopy
    • Stockle, R. M., Suh, Y. D., Deckert, V. & Zenobi, R. Nanoscale chemical analysis by tip-enhanced Raman spectroscopy. Chem. Phys. Lett. 318, 131-136 (2000).
    • (2000) Chem. Phys. Lett , vol.318 , pp. 131-136
    • Stockle, R.M.1    Suh, Y.D.2    Deckert, V.3    Zenobi, R.4
  • 17
    • 0037424143 scopus 로고    scopus 로고
    • High-resolution near-field Raman microscopy of single-walled carbon nanotubes
    • Hartschuh, A., Sanchez, E. J., Xie, X. S. & Novotny, L. High-resolution near-field Raman microscopy of single-walled carbon nanotubes. Phys. Rev. Lett. 90, 095503 (2003).
    • (2003) Phys. Rev. Lett , vol.90 , pp. 095503
    • Hartschuh, A.1    Sanchez, E.J.2    Xie, X.S.3    Novotny, L.4
  • 18
    • 33745762064 scopus 로고    scopus 로고
    • Nanoscale uniaxial pressure effect of a carbon nanotube bundle on tip-enhanced near-field Raman spectra
    • Yano, T. A., Inouye, Y. & Kawata, S. Nanoscale uniaxial pressure effect of a carbon nanotube bundle on tip-enhanced near-field Raman spectra. Nano Lett. 6, 1269-1273 (2006).
    • (2006) Nano Lett , vol.6 , pp. 1269-1273
    • Yano, T.A.1    Inouye, Y.2    Kawata, S.3
  • 19
    • 33645680220 scopus 로고    scopus 로고
    • Nanoscale characterization of strained silicon by tip-enhanced Raman spectroscope in reflection mode
    • Saito, Y., Motohashi, M., Hayazawa, N., Iyoki, M. & Kawata, S. Nanoscale characterization of strained silicon by tip-enhanced Raman spectroscope in reflection mode. Appl. Phys. Lett. 88, 143109 (2006).
    • (2006) Appl. Phys. Lett , vol.88 , pp. 143109
    • Saito, Y.1    Motohashi, M.2    Hayazawa, N.3    Iyoki, M.4    Kawata, S.5
  • 20
    • 33749577046 scopus 로고    scopus 로고
    • Raman spectral imaging - a nondestructive, high resolution analysis technique for local stress measurements in silicon
    • Schmidt, U., Ibach, W., Muller, J., Weishaupt, K. & Hollricher, O. Raman spectral imaging - a nondestructive, high resolution analysis technique for local stress measurements in silicon. Vibr. Spectrosc. 42, 93-97 (2006).
    • (2006) Vibr. Spectrosc , vol.42 , pp. 93-97
    • Schmidt, U.1    Ibach, W.2    Muller, J.3    Weishaupt, K.4    Hollricher, O.5
  • 21
    • 0000396112 scopus 로고    scopus 로고
    • Pressure-dependent properties of SiC polytypes
    • Karch, K., Bechstedt, F., Pavone, P. & Strauch, D. Pressure-dependent properties of SiC polytypes. Phys. Rev. B 53, 13400-13413 (1996).
    • (1996) Phys. Rev. B , vol.53 , pp. 13400-13413
    • Karch, K.1    Bechstedt, F.2    Pavone, P.3    Strauch, D.4
  • 22
    • 46449137333 scopus 로고    scopus 로고
    • Anisotropy contrast in phonon-enhanced apertureless near-field microscopy using a free-electron laser
    • Kehr, S. et al. Anisotropy contrast in phonon-enhanced apertureless near-field microscopy using a free-electron laser. Phys. Rev. Lett. 100, 256403 (2008).
    • (2008) Phys. Rev. Lett , vol.100 , pp. 256403
    • Kehr, S.1
  • 23
    • 0028443607 scopus 로고
    • Raman modes of 6H polytype of silicon-carbide to ultrahigh pressures - a comparison with silicon and diamond
    • Liu, J. & Vohra, Y. K. Raman modes of 6H polytype of silicon-carbide to ultrahigh pressures - a comparison with silicon and diamond. Phys. Rev. Lett. 72, 4105-4108 (1994).
    • (1994) Phys. Rev. Lett , vol.72 , pp. 4105-4108
    • Liu, J.1    Vohra, Y.K.2
  • 24
    • 20044379104 scopus 로고    scopus 로고
    • Scattering near-field optical microscopy of optically anisotropic systems
    • Schneider, S. C., Grafström, S. & Eng, L. M. Scattering near-field optical microscopy of optically anisotropic systems. Phys. Rev. B 71, 115418 (2005).
    • (2005) Phys. Rev. B , vol.71 , pp. 115418
    • Schneider, S.C.1    Grafström, S.2    Eng, L.M.3
  • 25
    • 33751078050 scopus 로고    scopus 로고
    • Spectroscopic near-field microscopy using frequency combs in the mid-infrared
    • Brehm, M., Schliesser, A. & Keilmann, F. Spectroscopic near-field microscopy using frequency combs in the mid-infrared. Opt. Exp. 14, 11222-11233 (2006).
    • (2006) Opt. Exp , vol.14 , pp. 11222-11233
    • Brehm, M.1    Schliesser, A.2    Keilmann, F.3
  • 26
    • 57049102116 scopus 로고    scopus 로고
    • Terahertz near-field nanoscopy of mobile carriers in single semiconductor nanodevices
    • Huber, A. J., Keilmann, F.,Wittborn, J., Aizpurua, J. & Hillenbrand, R. Terahertz near-field nanoscopy of mobile carriers in single semiconductor nanodevices. Nano Lett. 8, 3766-3770 (2008).
    • (2008) Nano Lett , vol.8 , pp. 3766-3770
    • Huber, A.J.1    Keilmann, F.2    Wittborn, J.3    Aizpurua, J.4    Hillenbrand, R.5
  • 27
    • 33847754280 scopus 로고    scopus 로고
    • On the Vickers indentation fracture toughness test
    • Quinn, G. D. & Bradt, R. C. On the Vickers indentation fracture toughness test. J. Am. Ceram. Soc. 90, 673-680 (2007).
    • (2007) J. Am. Ceram. Soc , vol.90 , pp. 673-680
    • Quinn, G.D.1    Bradt, R.C.2
  • 28
    • 0020783138 scopus 로고
    • Modelling of carrier mobility against carrier concentration in arsenic-doped, phosphorus-doped and boron-doped silicon
    • Masetti, G., Severi, M. & Solmi, S. Modelling of carrier mobility against carrier concentration in arsenic-doped, phosphorus-doped and boron-doped silicon. IEEE Trans. Electron. Dev. 30, 764-769 (1983).
    • (1983) IEEE Trans. Electron. Dev , vol.30 , pp. 764-769
    • Masetti, G.1    Severi, M.2    Solmi, S.3
  • 29
    • 24344446909 scopus 로고    scopus 로고
    • Near-field imaging of mid-infrared surface phonon polariton propagation
    • Huber, A., Ocelic, N., Kazantsev, D. & Hillenbrand, R. Near-field imaging of mid-infrared surface phonon polariton propagation. Appl. Phys. Lett. 87, 081103 (2005).
    • (2005) Appl. Phys. Lett , vol.87 , pp. 081103
    • Huber, A.1    Ocelic, N.2    Kazantsev, D.3    Hillenbrand, R.4
  • 30
    • 34547174742 scopus 로고    scopus 로고
    • Analytical model for quantitative prediction of material contrasts in scattering-type near-field optical microscopy
    • Cvitkovic, A., Ocelic, N. & Hillenbrand, R. Analytical model for quantitative prediction of material contrasts in scattering-type near-field optical microscopy. Opt. Exp. 15, 8550-8565 (2007).
    • (2007) Opt. Exp , vol.15 , pp. 8550-8565
    • Cvitkovic, A.1    Ocelic, N.2    Hillenbrand, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.