Raman spectral imaging-A nondestructive, high resolution analysis technique for local stress measurements in silicon

Vibrational Spectroscopy

Volumn 42, Issue 1, 2006, Pages 93-97

  Schmidt, U ^a   Ibach, W ^a   Muller J ^a   Weishaupt, K ^a   Hollricher, O ^a  

^a WITec Wissenschaftliche Instrumente und Technologie GmbH   (Germany)

Author keywords

AFM; Confocal Raman microscopy; Si stress images

Indexed keywords

CONFOCAL RAMAN MICROSCOPY; RAMAN SPECTRAL IMAGING; RESOLUTION CONFOCAL MICROSCOPY; SI STRESS IMAGES;

AUTOMATION; COMPOSITION; COMPRESSIVE STRESS; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS; TENSILE STRESS;

IMAGING TECHNIQUES;

EID: 33749577046     PISSN: 09242031     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vibspec.2006.01.005     Document Type: Article

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