Smooth contact capacitive pressure sensors in touch- and peeling-mode operation

IEEE Sensors Journal

Volumn 9, Issue 3, 2009, Pages 199-206

  Han, Jeahyeong ^a   Shannon, Mark A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Capacitive; Peeling and touch mode; Pressure sensor; Sensitivity; Smooth Contact

Indexed keywords

ATMOSPHERIC PRESSURE; PRESSURE SENSORS; PRESSURE TRANSDUCERS;

ACCURATE MEASUREMENTS; BOTTOM ELECTRODES; CAPACITIVE; CAPACITIVE PRESSURE SENSORS; CAPACITIVE PRESSURES; CAVITY SHAPES; GROUND PLANES; HIGH SENSITIVITIES; INITIAL CONTACTS; LINEAR RESPONSE; MEAN PRESSURES; MODE OPERATIONS; OPERATION MODES; PRESSURE DIFFERENCES; PRESSURE DIFFERENTIALS; SENSITIVITY; SMOOTH CONTACT;

DIAPHRAGMS;

EID: 60549103304     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.2011090     Document Type: Article

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