Smooth contact mode capacitive pressure sensor with polyimide diaphragm

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 1468-1471

  Han, Jeahyeong ^a   Yeom, Junghoon ^a   Lee, Junghyun ^a   Shannon, Mark A ^a   Masel, Richard I ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL DESIGN; POLYMERS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; STANDARDS;

ACCURATE MEASUREMENTS; APPLICATIONS.; BIO-MEMS; CAPACITIVE PRESSURE; CAPACITIVE PRESSURE SENSORS; CONDUCTING MEMBRANES; CONTACT MODES; ELECTRODE SHAPES; GROUND PLANE; HIGH SENSITIVITIES; INITIAL CONTACT; LINEAR RESPONSE; LOW PRESSURES; POLY IMIDE; PRESSURE DIFFERENCES; ZERO PRESSURE;

SENSORS;

EID: 48349132133     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388691     Document Type: Conference Paper

References (7)

1. Chang, S. P., J. B. Lee, M. G. Allen, "Robust capacitive pressure sensor array," Sensors and Actuators A 101, pp 231-238, 2002.
2. Ko, W. H. and W. Qiang, "Touch mode capacitive pressure sensors." Sensors and Actuators A Vol.70, pp. 242-251, 1999.
3. Gupta, A., A. Ahmad, et al. "A capacitive pressure sensor for MEMS." Proceedings of SPIE 5062, 2003.
4. Zhou, M.-X., Q.-A. Huang, et al. "A novel capacitive pressure sensor based on sandwich structures." Journal of microelectromechanical systems, 14(6), 2005.
5. Han, J., S. Yang, and M.A. Shannon, "Peeling Mode Capacitive Pressure Sensor for Sub-kPa Pressure Measurements", ASME International Conference 2006 Chicago, Nov 5-10, 2006.
6. Bruce R. Flachsbart, Kachuen Wong, Jamie M. Iannacone, Edward N. Abante, Robert L. Vlach, Peter A. Rauchfuss, Paul W. Bohn, Jonathan V. Sweedler, Mark A. Shannon, Design and fabrication of a multilayered polymer microfluidic chip with nanofluidic interconnects via adhesive contact printing, Lab Chip, 5, pp. 667-674, 2006.
7. Kerstin E. Babbitt, Lynn Fuller, and Bradley Keller, "A Surface Micromachined Capacitive Pressure Sensor for Biomedical Applications", Biennial University/Government/Industry Microelectronics Symposium-Preoceedings, pp. 150-153, 1997