Analytical modeling of electrostatic membrane actuator for micro pumps

Journal of Microelectromechanical Systems

Volumn 8, Issue 3, 1999, Pages 335-345

  Saif, M T A ^a   Alaca, B Erdem ^a   Sehitoglu, Huseyin ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES;

MICROPUMPS;

MICROACTUATORS;

EID: 0032594980     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.788638     Document Type: Article

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