A ceramic capacitive pressure microsensor with screen-printed diaphragm

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 1271-1274

  Sippola, C B ^a   Ahn, C H ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC CAPACITORS; DIAPHRAGMS; ELECTRODEPOSITION; SCREEN PRINTING;

CERAMIC CAPACITIVE PRESSURE MICROSENSORS; CERAMIC CAVITY; HERMETICITY;

MICROSENSORS;

DIAPHRAGMS; ELECTROPLATING; SENSORS; SILK SCREEN PRINTING;

EID: 33744492095     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597938     Document Type: Conference Paper

References (12)

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