A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 251-254

  Fung, Carmen K M ^a   Zhang, Maggie Q H ^a   Chan, Rosa H M ^a   Li, Wen J ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; CARBON NANOTUBES; DIAPHRAGMS; ELECTRIC CURRENTS; ELECTRIC RESISTANCE; ELECTROPHORESIS; POLYMETHYL METHACRYLATES; PRESSURE EFFECTS; SENSORS;

MICRO PRESSURE SENSOR CHIPS; MULTI-WALLED CARBON NANOTUBE (MWNT); PIEZORESISTIVE SENSING; POLYMERIC DIAPHRAGMS;

MICROPROCESSOR CHIPS;

EID: 26844528588     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. R. J. Pryputniewicz et al., "Multivariable MEMS polysilicon piezoresistive sensor:analysis and measurements", Proc. Internat. Symp. on Microscale Systems, pp. 76-79, 2000.
2. T. W. Tombler et al., "Reversible electromechanical characteristics of carbon nanotubes under local-probe manipulation", Nature, vol. 405, pp. 769-772, 2000.
3. V. T. S. Wong et al., "Bulk Carbon Nanotubes as Sensing Element for Temperature and Anemometry Micro Sensing", Proc. IEEE MEMS 2003, pp. 41-44, 2003.
4. C. K. M. Fung et al., "Fabrication and Characterization of Encapsulated Carbon Nanotube Bundled MEMS Sensors', Proc. IEEE NANO 2004, Germany, 2004.
5. S. Timoshenko, S. Woinowsky-Krieger, "Theory of plates and shells", New York McGraw-Hill, c1959.