A capacitive differential pressure sensor with polyimide diaphragm

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 250-252

  Pedersen, M ^a   Meijerink, M G H ^a   Olthuis, W ^a   Bergveld, P ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; POLYIMIDES;

CAPACITIVE DIFFERENTIAL PRESSURE SENSORS;

PRESSURE TRANSDUCERS;

EID: 0031224738     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/046     Document Type: Article

References (6)

1. Pedersen M, Olthuis W and Bergveld P 1997 A silicon condenser microphone with polyimide diaphragm and backplate Sens. Actuators A accepted
2. Timoshenko S P and Woinowsky-Krieger S 1959 Theory of Plates and Shells 2nd edn (New York: McGraw-Hill)
3. Pedersen M, Olthuis W and Bergveld P 1995 Modelling and simulation of the quasi static behaviour of silicon condenser microphones Proc. MME'95 (Copenhagen, Denmark) September 1995
4. Pedersen M, Meijerink M G H, Olthuis W and Bergveld P 1997 An IC-compatible polyimide pressure sensor with capacitive read-out Sens. Actuators A accepted
5. Jensen R J, Cummings J P and Vora H 1984 Copper/polyimide materials system for high performance packaging IEEE Trans. Compon. Hybrids Manuf. Technol. 7 384
6. Rohde O, Smolka P, Falcigno P A and Pfeifer J 1992 Novel auto-photosensitive polyimides with tailored properties Polym. Eng. Sci. 32 1623-9