A capacitive pressure sensor for MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5062, Issue 1, 2002, Pages 450-454

  Gupta, Amita ^a   Ahmad, Amir ^a   Singh, Ranvir ^a  

^a SOLID STATE PHYSICS LABORATORY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SOFTWARE; DEFORMATION; DIAPHRAGMS; INDUSTRIAL APPLICATIONS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRESSURE MEASUREMENT; SILICON;

BULK SILICON MICROMACHINING; CAPACITIVE PRESSURE SENSOR; DIAPHRAGM DEFLECTION; DIAPHRAGM DEFORMATION;

MICROSENSORS;

EID: 1342269499     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. R.F. Wolffenbuttel, "Integrated micromachanical sensors and actuators in silicon", Mechatronics, Vol. 1, 37-391, 1991.
2. S. Chatzandroulis, D Tsoukalas and PA Neukomm, "A miniature pressure system with a capacitive sensor and a passive telemetry link for use in Implantable applications" J of Microelectromechanical system Vol. 9, 18-23, 2000.
3. W.H. Ko and Q. Wang, "Touchmade capacitive pressure sensor" Sensors and Actuators, Vol 75, 242-251, 1999.