Analytical model for an electrostatically actuated miniature diaphragm compressor

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Sathe, Abhijit A ^a   Groll, Eckhard A ^a   Garimella, Suresh V ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; ELECTRODES; ELECTROSTATICS; REFRIGERATION;

CHAMBER PRESSURE; MINIATURE DIAPHRAGM COMPRESSORS; MINIATURE SCALE REFRIGERATION SYSTEM;

COMPRESSORS;

EID: 42549147366     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035010     Document Type: Article

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