Robust capacitive pressure sensor array

Sensors and Actuators, A: Physical

Volumn 101, Issue 1-2, 2002, Pages 231-238

  Chang, Sung Pil ^a   Lee, Jeong Bong ^a,b   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b The University of Texas at Dallas   (United States)

Author keywords

Capacitive pressure sensor; Lamination; Micromachining; Robust substrate

Indexed keywords

MICROMACHINING; PRESSURE MEASUREMENT; STAINLESS STEEL; SUBSTRATES;

CAPACITIVE PRESSURE SENSOR; LAMINATION; ROBUST SUBSTRATES;

MICROSENSORS;

EID: 0037201893     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00193-0     Document Type: Article

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