Modeling, design and fabrication of a triple-layered capacitive pressure sensor

Sensors and Actuators, A: Physical

Volumn 117, Issue 1, 2005, Pages 71-81

  Zhou, Min Xin ^a   Huang, Qing An ^a   Qin, Ming ^a  

^a Southeast University   (China)

Author keywords

Capacitive pressure sensors; Energy method; FEM; Linearity

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; FINITE ELEMENT METHOD; INTERFEROMETRY; NONLINEAR SYSTEMS; TRANSDUCERS;

CAPACITIVE PRESSURE SENSORS; ENERGY METHOD; STRESS COMPENSATION;

SENSORS;

EID: 9644265402     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.05.036     Document Type: Article

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