Electrostatic actuation as a self-testing method for silicon pressure sensors

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 32-36

  Cozma, Adriana ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Electrostatic actuation; Pressure sensors; Self testing

Indexed keywords

ACTUATORS; ELECTRIC PROPERTIES; ELECTROSTATICS; MEMBRANES; PRESSURE EFFECTS; TESTING;

ELECTROSTATIC ACTUATION; PRESSURE SENSORS; SELF TESTING METHOD;

SILICON SENSORS;

EID: 0031141302     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01417-3     Document Type: Article

References (3)

1. H.V. Aleen, S.C. Terry and D.W. De Bruin, Accelerometer systems with self-testable features, Sensors and Actuators, 20 (1989) 153-161.
2. R. Puers and D. Lapadatu, Electrostatic forces and their effects on capacitive mechanical sensors, Sensor and Actuators A, 56 (1996) 203-210.
3. E. Peeters, Process development for 3D silicon microstructures, with application to mechanical sensor devices, Ph.D. Thesis, K.U. Leuven, Faculty of Applied Sciences, 1994.