A phenomenological discrete brittle damage-mechanics model for fatigue of MEMS devices with application to LIGA Ni

Journal of Microelectromechanical Systems

Volumn 18, Issue 1, 2009, Pages 119-128

  Slack, Trevor S ^a   Sadeghi, Farshid ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Damage mechanics; Discrete element method; Fatigue; Microelectromechanical systems (MEMS)

Indexed keywords

COMPOSITE MICROMECHANICS; CONTINUUM DAMAGE MECHANICS; CONTINUUM MECHANICS; CRACK INITIATION; CRACKS; ELECTROMECHANICAL DEVICES; FATIGUE DAMAGE; FRACTURE MECHANICS; MATERIALS; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; STRESSES;

BRITTLE DAMAGES; CONTINUUM DAMAGES; DAMAGE MECHANICS; DISCRETE MATERIALS; DISCRETE-ELEMENT METHOD; DOG BONES; FATIGUE; FATIGUE CRACK INITIATIONS; FATIGUE DATUM; FATIGUE INITIATIONS; FATIGUE LIVES; FATIGUE LOADINGS; FATIGUE STRESS; GEOMETRICAL RANDOMNESS; LOADING CONDITIONS; MATERIAL HETEROGENEITIES; MATERIAL PROPERTIES; MEMS DEVICES; MEMS RESONATORS; MICROELECTROMECHANICAL SYSTEMS (MEMS); RIGID ELEMENTS; SPRING STIFFNESS; STATISTICAL DISTRIBUTIONS; STRESS LIVES;

FATIGUE OF MATERIALS;

EID: 60449116631     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2008064     Document Type: Article

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