Micromechanical testing of MEMS materials

Journal of Materials Science

Volumn 38, Issue 20, 2003, Pages 4081-4086

  Buchheit, T E ^a   Glass, S J ^a   Sullivan, J R ^a   Mani, S S ^a   Lavan, D A ^b   Friedmann, T A ^a   Janek, R ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; DIAMONDS; ELECTRODEPOSITION; FORCE MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MULTILAYERS; POLYMETHYL METHACRYLATES; POLYSILICON; SILICON WAFERS; TENSILE TESTING; X RAY LITHOGRAPHY;

AMORPHOUS DIAMOND; MULTILAYER FILM DEPOSITION; NANOINDENTATION SYSTEM; SURFACE MICROMACHINED;

MATERIALS TESTING;

EID: 0344584826     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026365219307     Document Type: Article

References (13)

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