Fatigue test of AL-3%TI using axial loading testing machine for mems materials

Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005

Volumn PART C, Issue , 2006, Pages 1725-1730

  Park, Jun Hyub ^a   Choa, Sung Hoon ^b   Choi, Hyeon Chang ^a   Myung, Man Sik ^c   Lee, Chang Seung ^b   Kim, Yun Jae ^c  

^a Tongmyong University of Information Technology   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; FATIGUE OF MATERIALS; TENSILE TESTING;

CYCLE FATIGUE TESTS; MEMS SWITCHES;

THIN FILMS;

EID: 32844468559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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