Deposition of indium-tin-oxide films on polymer substrates for application in plastic-based flat panel displays

Thin Solid Films

Volumn 397, Issue 1-2, 2001, Pages 49-55

  Park, Sung Kyu ^a   Han, Jeong In ^a   Kim, Won Keun ^a   Kwak, Min Gi ^a  

^a Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

Annealing; Indium tin oxide; Oxygen; Polymers

Indexed keywords

ANNEALING; CONDUCTIVE FILMS; DEPOSITION; ELECTRIC RESISTANCE MEASUREMENT; FLAT PANEL DISPLAYS; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; PARTIAL PRESSURE; SUBSTRATES; THERMAL EXPANSION; TRANSPARENCY; X RAY DIFFRACTION ANALYSIS;

TENSILE FORCES;

METALLIC FILMS;

EID: 0035499687     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01489-4     Document Type: Article

References (15)