Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors

Review of Scientific Instruments

Volumn 76, Issue 7, 2005, Pages

  Kim, Dongmin ^a   Kang, Dongwoo ^a   Shim, Jongyeop ^a   Song, Incheon ^a   Gweon, Daegab ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ABBE ERRORS; HETERODYNE INTERFEROMETERS; OPTIMAL DESIGN; TOPOGRAPHIC IMAGES;

ERROR DETECTION; IMAGE ANALYSIS; IMAGING SYSTEMS; OPTIMAL CONTROL SYSTEMS; SCANNING; SENSORS;

ATOMIC FORCE MICROSCOPY;

EID: 22944462685     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1978827     Document Type: Article

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