Minimizing scanning errors in piezoelectric stack-actuated nanopositioning platforms

IEEE Transactions on Nanotechnology

Volumn 7, Issue 1, 2008, Pages 79-90

  Aphale, Sumeet S ^b   Bhikkaji, Bharath ^b   Moheimani, S O Reza ^a,b  

^a IEEE

^b UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Feedback control; Nanopositioning; Resonance damping; Tracking

Indexed keywords

ALGORITHMS; HYSTERESIS; KINEMATICS; POLYNOMIALS;

NANOPOSITIONING PLATFORMS; RESONANCE DAMPING;

PIEZOELECTRIC ACTUATORS;

EID: 38149093298     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2007.910333     Document Type: Article

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