Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

Sensors and Actuators, A: Physical

Volumn 149, Issue 2, 2009, Pages 305-314

  Sainiemi, Lauri ^a   Grigoras, Kestas ^a   Kassamakov, Ivan ^b   Hanhijärvi, Kalle ^b   Aaltonen, Juha ^b   Fan, Ji ^a   Saarela, Ville ^a   Hæggström, Edward ^b   Franssila, Sami ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Cryogenic DRIE; Mechanical deflection; Microbridge; Silicon; Silicon on insulator; White light interferometry

Indexed keywords

ACTUATORS; CRYOGENICS; DEFLECTION (STRUCTURES); FABRICATION; INTERFEROMETERS; INTERFEROMETRY; MELTING POINT; MICROSENSORS; NONMETALS; QUALITY CONTROL; SEMICONDUCTING SILICON COMPOUNDS; THERMAL EXPANSION; THERMAL SPRAYING;

CRYOGENIC DRIE; MECHANICAL DEFLECTION; MICROBRIDGE; SILICON; SILICON-ON-INSULATOR; WHITE LIGHT INTERFEROMETRY;

SILICON WAFERS;

EID: 58949094349     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.11.031     Document Type: Article

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