Thermal investigation of micro-filament heaters

Sensors and Actuators, A: Physical

Volumn 99, Issue 1-2, 2002, Pages 98-103

  Furjes P ^a   Vizvary Zs ^b   Adam M ^a   Morrissey, A ^c   Ducso Cs ^a   Barsony I ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^c UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Gas sensing; Micro filament; Optical temperature measurement; Thermal simulation

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; OPTICAL VARIABLES MEASUREMENT; TEMPERATURE MEASUREMENT; THERMOANALYSIS;

MICRO-FILAMENT HEATERS;

CHEMICAL SENSORS;

EID: 0037197314     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00905-0     Document Type: Conference Paper

References (6)

1. Fast, efficient bulk micro-machined heater for integrated sensor applications
2. Porous silicon bulk micromachining for thermally isolated membrane formation
3. Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications