Silicon microsystem - miniaturised infrared spectrometer

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1257-1258

  Blomberg, Martti ^a   Rusanen, Outi ^a   Keranen, Kimmo ^a   Lehto, Ari ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; FABRY-PEROT INTERFEROMETERS; INFRARED DETECTORS; INFRARED RADIATION; INTEGRATED CIRCUITS; PHOTODETECTORS; SEMICONDUCTING SILICON;

SILICON MICROSYSTEM;

INFRARED SPECTROMETERS;

EID: 0030715110     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)