A nondestructive dynamic characterization of a microheater through digital holographic microscopy

Journal of Microelectromechanical Systems

Volumn 16, Issue 3, 2007, Pages 659-667

  Coppola, Giuseppe ^a   Striano, Valerio ^b   Ferraro, Pietro ^c   De Nicola, Sergio ^d   Finizio, Andrea ^d   Pierattini, Giovanni ^d   Maccagnani, Piera ^a  

^a CNR   (Italy)

^b UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

^c ISTITUTO NAZIONALE DI OTTICA   (Italy)

^d CNR   (Italy)

Author keywords

Holographic interferometry; Nondestructive testing; Thermoelectric devices

Indexed keywords

DYNAMIC ANALYSIS; HOLOGRAPHIC INTERFEROMETRY; NONDESTRUCTIVE EXAMINATION; SILICON NITRIDE; THERMAL EXPANSION; THERMAL LOAD;

DIGITAL HOLOGRAPHIC MICROSCOPE; MICROHEATER;

THERMOELECTRIC EQUIPMENT;

EID: 34547725280     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.896707     Document Type: Article

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