Design and fabrication of a cascaded electro-thermal bimorph actuator

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 433-438

  Lin, Chen Hsuan ^a   Yeh, Chena Chi ^a   Hsu, Chen Peng ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Actuator; Bimorph; Cascaded; Heating region; Thermal

Indexed keywords

BIMORPH; CASCADED; HEATING REGION; SILICON ISOTROPIC ETCHING;

CASCADE CONTROL SYSTEMS; CONSTRAINT THEORY; ETCHING; HEATING; MICROMACHINING; THERMOANALYSIS;

MICROACTUATORS;

EID: 33645996707     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-79854     Document Type: Conference Paper

References (13)

1. Riethmuller W and Benecke W, 1988, Thermally excited silicon microactuators IEEE Trans. Electron Devices 35 758-762
2. Buser R A, Rooij N F, Tischhauser H, Dommann A and Staufert G, 1992, Biaxial scanning mirror activated by bimorph structures for medical applications Sensors Actuators A 31 29-34
3. Greitmann G and Buser R A, 1995, Tactile microgripper for automated handling of micro parts Transducers'95 pp 372-375
4. Suh J W, Darling R B, B̈ohringer K-F, Donald B R, Baltes H and Kovacs G T A, 1999, CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects J. Microelectromech. Syst. 8 483-496
5. Schweizer S, Cousseau P, Lammel G, Calmes S and Renaud Ph, 2000, Two-dimensional thermally actuated optical microprojector Sensors Actuators A 85 424-429
6. Huja M and Husak M, 2001, Thermal microactuators for optical purpose Proc. Micro Electromechanical Systems '01 pp 137-142
7. Jerman H, 1994, Electrically-activated normally-closed diaphragm valves J. Micromech. Microeng. 4, 210-216
8. Puers R, Cozma A and Bruyker D D, 1998, On the mechanisms in the thermally actuated composite diaphragms Sensors Actuators A 67 13-17
9. Zou Q, Sridhar U and Lin R, 1999, A study on micromachined bimetallic actuation Sensors Actuators A 78 212-219
10. Hsu C and Hsu W, 2000, A two-way membrane-type micro-actuator with continuous deflections J. Micromech. Microeng. 10 387-394
11. Robbins, W.P., and Glumac, D.E., 1998, A planar unimorph-based actuator with large vertical displacement capability. II. Theory, Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions, Vol. 45, Issue 5, pp. 1151-1160, Sept. 1998.
12. Glumac, D.E., and Robbins, W.P., "A planar unimorph-based actuator with large vertical displacement capability. I. Experiment", Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, Vol. 45, Issue 5, pp. 1145-1150, Sept. 1998.
13. Hsu C P and Hsu W, 2003, Instability in micromachined curved thermal bimorph structure, J. Micromech. Microeng. 13 955-962