Two-way membrane-type micro-actuator with continuous deflections

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 387-394

  Hsu, Chenpeng ^a   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; THERMAL EXPANSION;

MICROMEMBRANE ACTUATORS;

MICROACTUATORS;

EID: 0034273077     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/313     Document Type: Article

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