메뉴 건너뛰기




Volumn 1, Issue 5, 1996, Pages 679-683

Mechanical properties of thin films and multilayers

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001754987     PISSN: 13590286     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-0286(96)80051-9     Document Type: Article
Times cited : (23)

References (61)
  • 13
    • 0002880642 scopus 로고
    • Mechanical behavior of thin films
    • Bravman JC, Nix WD (Eds): Mechanical behavior of thin films. MRS Bull 1992, 17.
    • (1992) MRS Bull , pp. 17
    • Bravman, J.C.1    Nix, W.D.2
  • 14
    • 1242327986 scopus 로고
    • Stress determination in textured thin films using X-ray diffraction
    • Clemens, BM, Bain JA: Stress determination in textured thin films using X-ray diffraction. MRS Bull 1992, 17:46-51.
    • (1992) MRS Bull , vol.17 , pp. 46-51
    • Clemens, B.M.1    Bain, J.A.2
  • 15
    • 0000014097 scopus 로고
    • A UHV-compatible thin film stress measuring apparatus based on the cantilever beam technique
    • Koch R, Leonhard H, Thurner G, Abermann R: A UHV-compatible thin film stress measuring apparatus based on the cantilever beam technique. Rev Sci Instrum 1990, 61:3859-3862.
    • (1990) Rev Sci Instrum , vol.61 , pp. 3859-3862
    • Koch, R.1    Leonhard, H.2    Thurner, G.3    Abermann, R.4
  • 16
    • 0023312081 scopus 로고
    • Measurement and interpretation of stress in aluminum-based metallization as a function of thermal history
    • Flinn PA, Gardner DS, Nix WD: Measurement and interpretation of stress in aluminum-based metallization as a function of thermal history. IEEE Trans Electron Dev 1987, ED-34:689-699.
    • (1987) IEEE Trans Electron Dev , vol.ED-34 , pp. 689-699
    • Flinn, P.A.1    Gardner, D.S.2    Nix, W.D.3
  • 17
    • 36449005943 scopus 로고
    • Stress and plastic flow in silicon during amorphization by ion bombardment
    • Volkert CA: Stress and plastic flow in silicon during amorphization by ion bombardment. J Appl Phys 1991, 70:3521.
    • (1991) J Appl Phys , vol.70 , pp. 3521
    • Volkert, C.A.1
  • 18
    • 0029726330 scopus 로고    scopus 로고
    • Real time measurement of epilayer strain using a simplified wafer curvature technique
    • Floro JA, Chason E, Lee SR: Real time measurement of epilayer strain using a simplified wafer curvature technique. Mater Res Soc Symp Proc 1996, 405:381-386. This covers the latest advance in curvature measurements, which minimizes the effect of sample vibration.
    • (1996) Mater Res Soc Symp Proc , vol.405 , pp. 381-386
    • Floro, J.A.1    Chason, E.2    Lee, S.R.3
  • 19
    • 0000333183 scopus 로고
    • X-ray diffraction analysis of strains and stresses in thin films
    • Edited by Tu KN, Rosenberg R. New York: Academic Press; Hermann H (Series Editor)
    • Segmüller A, Murakami M: X-ray diffraction analysis of strains and stresses in thin films. In Treatise on Materials Science and Technology. Edited by Tu KN, Rosenberg R. New York: Academic Press; 1988:143-200. [Hermann H (Series Editor)]
    • (1988) Treatise on Materials Science and Technology , pp. 143-200
    • Segmüller, A.1    Murakami, M.2
  • 21
    • 0028492183 scopus 로고
    • Laser ablation deposition of Cu-Ni and Ag-Ni films: Nonconservation of alloy composition and film microstructure
    • Van Ingen RP, Fastenau RHJ, Mittemeijer EJ: Laser ablation deposition of Cu-Ni and Ag-Ni films: nonconservation of alloy composition and film microstructure. J Appl Phys 1994, 76:1871-1883.
    • (1994) J Appl Phys , vol.76 , pp. 1871-1883
    • Van Ingen, R.P.1    Fastenau, R.H.J.2    Mittemeijer, E.J.3
  • 22
    • 34547293442 scopus 로고
    • Bulk and interface stresses in Ag/Ni multilayered thin films
    • Ruud, JA, Witvrouw A, Spaepen F: Bulk and interface stresses in Ag/Ni multilayered thin films. J Appl Phys 1993, 74:2517-2523.
    • (1993) J Appl Phys , vol.74 , pp. 2517-2523
    • Ruud, J.A.1    Witvrouw, A.2    Spaepen, F.3
  • 23
    • 0000996939 scopus 로고
    • Elastic strains and coherency stresses in Mo/Ni multilayers
    • Bain JA, Chyung LJ, Brennan SM, Clemens BM: Elastic strains and coherency stresses in Mo/Ni multilayers. Phys Rev B 1991, 44:1184-1192.
    • (1991) Phys Rev B , vol.44 , pp. 1184-1192
    • Bain, J.A.1    Chyung, L.J.2    Brennan, S.M.3    Clemens, B.M.4
  • 24
    • 0024766321 scopus 로고
    • Mechanical properties of thin films
    • Nix WD: Mechanical properties of thin films. Metall Mater Trans A 1989, 20A:2217-2245.
    • (1989) Metall Mater Trans A , vol.20 A , pp. 2217-2245
    • Nix, W.D.1
  • 25
    • 17044389224 scopus 로고
    • Elastic relationships in layered composite media with approximation for the case of thin films on a thick substrate
    • Townsend PH, Barnett DM, Brunner TA: Elastic relationships in layered composite media with approximation for the case of thin films on a thick substrate. J Appl Phys 1987, 62:4438-4444.
    • (1987) J Appl Phys , vol.62 , pp. 4438-4444
    • Townsend, P.H.1    Barnett, D.M.2    Brunner, T.A.3
  • 26
    • 0029305679 scopus 로고
    • Elastoplastic deformation of multilayered materials during thermal cycling
    • Shen YL, Suresh S: Elastoplastic deformation of multilayered materials during thermal cycling. J Mater Res 1995, 10:1200-1215.
    • (1995) J Mater Res , vol.10 , pp. 1200-1215
    • Shen, Y.L.1    Suresh, S.2
  • 28
    • 21544456019 scopus 로고
    • Viscosity and elastic constants of amorphous Si and Ge
    • Witvrouw A, Spaepen F: Viscosity and elastic constants of amorphous Si and Ge. J Appl Phys 1993, 74:7154-7161.
    • (1993) J Appl Phys , vol.74 , pp. 7154-7161
    • Witvrouw, A.1    Spaepen, F.2
  • 29
    • 0024129196 scopus 로고
    • Stresses and deformation processes in thin films on substrates
    • Doerner MF, Nix WD: Stresses and deformation processes in thin films on substrates. CRC Crit Rev Solid State Mater Sci 1988, 14:225-268.
    • (1988) CRC Crit Rev Solid State Mater Sci , vol.14 , pp. 225-268
    • Doerner, M.F.1    Nix, W.D.2
  • 30
    • 0029346335 scopus 로고
    • The thermomechanical integrity of thin films and multilayers
    • Evans AG, Hutchinson JW: The thermomechanical integrity of thin films and multilayers. Acta Metall Mater 1995, 43:2507-2530. An authoritative review of failure mechanisms. The appendix gives a clear, concise review of the mechanisms that give rise to intrinsic stresses. The stress exerted by the grain boundaries should be computed using the interface stress rather than the interface energy (see [38] and 'Surface and and interface stresses' section).
    • (1995) Acta Metall Mater , vol.43 , pp. 2507-2530
    • Evans, A.G.1    Hutchinson, J.W.2
  • 31
    • 0001536019 scopus 로고
    • Stresses in thin films: The relevance of grain boundaries and impurities
    • Hoffman RW: Stresses in thin films: the relevance of grain boundaries and impurities. Thin Solid Films 1976, 34:185-190.
    • (1976) Thin Solid Films , vol.34 , pp. 185-190
    • Hoffman, R.W.1
  • 32
    • 0025538906 scopus 로고
    • Measurements of the intrinsic stress in thin metal films
    • Abermann R: Measurements of the intrinsic stress in thin metal films. Vacuum 1990, 41:1279-1282.
    • (1990) Vacuum , vol.41 , pp. 1279-1282
    • Abermann, R.1
  • 33
    • 0028767879 scopus 로고
    • The intrinsic stress of polycrystalline and epitaxial thin metal films
    • Koch R: The intrinsic stress of polycrystalline and epitaxial thin metal films. J Phys: Condens Matter 1994, 6:9519-9550.
    • (1994) J Phys: Condens Matter , vol.6 , pp. 9519-9550
    • Koch, R.1
  • 35
    • 0001132577 scopus 로고    scopus 로고
    • Measurements of stress during vapor deposition of copper and silver thin films and multilayers
    • in press
    • Shull AL, Spaepen F: Measurements of stress during vapor deposition of copper and silver thin films and multilayers. J Appl Phys 1996, 80: in press. Direct observation of the asymptotic compressive stress. Insitu method for determining the interface stress.
    • (1996) J Appl Phys , vol.80
    • Shull, A.L.1    Spaepen, F.2
  • 36
    • 0028436888 scopus 로고
    • Surface and interface stress effects in thin films
    • Cammarata RC: Surface and interface stress effects in thin films. Prog Surf Sci 1994, 46:1-38.
    • (1994) Prog Surf Sci , vol.46 , pp. 1-38
    • Cammarata, R.C.1
  • 37
    • 0027002459 scopus 로고
    • Intrinsic stress in sputter-deposited thin films
    • Windischmann H: Intrinsic stress in sputter-deposited thin films. CRC Crit Rev Solid State Mater Sci 1992, 17:547-596.
    • (1992) CRC Crit Rev Solid State Mater Sci , vol.17 , pp. 547-596
    • Windischmann, H.1
  • 39
    • 0029518959 scopus 로고
    • The Ag/Cu interface stress
    • Berger S, Spaepen F: The Ag/Cu interface stress. Nano Mater 1995, 6:201-204.
    • (1995) Nano Mater , vol.6 , pp. 201-204
    • Berger, S.1    Spaepen, F.2
  • 40
    • 0005296376 scopus 로고
    • Determination of the plane stress elastic constants of thin films from substrate curvature measurements
    • Witvrouw A, Spaepen F: Determination of the plane stress elastic constants of thin films from substrate curvature measurements. J Appl Phys 1993, 73:7344-7350.
    • (1993) J Appl Phys , vol.73 , pp. 7344-7350
    • Witvrouw, A.1    Spaepen, F.2
  • 41
    • 0028747824 scopus 로고
    • Mechanical properties of compositionally modulcated Au-Ni thin films: Nanoindentation and microcantilever deflection experiments
    • Baker SP, Nix WD: Mechanical properties of compositionally modulcated Au-Ni thin films: nanoindentation and microcantilever deflection experiments. J Mater Res 1994, 9:3131-3143.
    • (1994) J Mater Res , vol.9 , pp. 3131-3143
    • Baker, S.P.1    Nix, W.D.2
  • 44
    • 0642300009 scopus 로고
    • Time-resolved thermal and acoustic pulse-echo measurements in condensed matter
    • Eesley GL, Paddock CA, Clemens BM: Time-resolved thermal and acoustic pulse-echo measurements in condensed matter. Proc SPIE 1987, 794:34-37.
    • (1987) Proc SPIE , vol.794 , pp. 34-37
    • Eesley, G.L.1    Paddock, C.A.2    Clemens, B.M.3
  • 45
    • 0028733141 scopus 로고
    • Intrinsic stresses in compositionally modulated Au-Ni thin films and the supermodulus effect
    • Baker SP, Nix WD: Intrinsic stresses in compositionally modulated Au-Ni thin films and the supermodulus effect. J Mater Res 1994, 9:3145-3152.
    • (1994) J Mater Res , vol.9 , pp. 3145-3152
    • Baker, S.P.1    Nix, W.D.2
  • 46
    • 0000800786 scopus 로고
    • On the mechanical strength of free-standing and substrate-bonded Al thin films
    • Heinen D, Bohn HG, Schilling W: On the mechanical strength of free-standing and substrate-bonded Al thin films. J Appl Phys 1995, 77:3742-3745. The 'drumhead' technique is used for determining the stress. The paper gives other references to low static moduli in thin films.
    • (1995) J Appl Phys , vol.77 , pp. 3742-3745
    • Heinen, D.1    Bohn, H.G.2    Schilling, W.3
  • 48
    • 0029745869 scopus 로고    scopus 로고
    • Measurement of Young's modulus and Poission's ratio of free-standing Ag/Cu multilayer thin films
    • Huang H, Spaepen F: Measurement of Young's modulus and Poission's ratio of free-standing Ag/Cu multilayer thin films. Mater Res Soc Symp Proc 1996, 405:501-506. Tensile testing, using the diffraction technique described in [47] for insitu strain measurement.
    • (1996) Mater Res Soc Symp Proc , vol.405 , pp. 501-506
    • Huang, H.1    Spaepen, F.2
  • 49
    • 0017470788 scopus 로고
    • Enhanced elastic modulus in composition-modulated gold-nickel and copper-palladium foils
    • Yang WMC, Tsakalakos T, Hilliard JE: Enhanced elastic modulus in composition-modulated gold-nickel and copper-palladium foils. J Appl Phys 1977, 48:876-879.
    • (1977) J Appl Phys , vol.48 , pp. 876-879
    • Wmc, Y.1    Tsakalakos, T.2    Hilliard, J.E.3
  • 50
    • 0022012317 scopus 로고
    • Mechanical properties of composition modulated Cu-Ni foils
    • Baral D, Ketterson JB, Hilliard JE: Mechanical properties of composition modulated Cu-Ni foils. J Appl Phys 1985, 57:1076-1083.
    • (1985) J Appl Phys , vol.57 , pp. 1076-1083
    • Baral, D.1    Ketterson, J.B.2    Hilliard, J.E.3
  • 51
    • 0012631276 scopus 로고
    • Deformation mechanisms in thin films
    • Frost HJ: Deformation mechanisms in thin films. Mater Res Soc Symp Proc 1992, 265:3-14.
    • (1992) Mater Res Soc Symp Proc , vol.265 , pp. 3-14
    • Frost, H.J.1
  • 54
    • 0028446886 scopus 로고
    • On dislocation storage and the mechanical response of fine scale microstructures
    • Embury JD, Hirth JP: On dislocation storage and the mechanical response of fine scale microstructures. Acta Metall Mater 1994, 42:2051-2056.
    • (1994) Acta Metall Mater , vol.42 , pp. 2051-2056
    • Embury, J.D.1    Hirth, J.P.2
  • 55
    • 0026903429 scopus 로고
    • Separation of film thickness and grain boundary strengthening effects in Al thin films on Si
    • Venkataraman R, Bravman JC: Separation of film thickness and grain boundary strengthening effects in Al thin films on Si. J Mater Res 1992, 7:2040-2048.
    • (1992) J Mater Res , vol.7 , pp. 2040-2048
    • Venkataraman, R.1    Bravman, J.C.2
  • 56
    • 0026902054 scopus 로고
    • Effects of grain orientation on hillock formation and grain growth in aluminum films on silicon substrates
    • Sanchez JE, Arzt E: Effects of grain orientation on hillock formation and grain growth in aluminum films on silicon substrates. Scr Metall Mater 1992, 27:285-290.
    • (1992) Scr Metall Mater , vol.27 , pp. 285-290
    • Sanchez, J.E.1    Arzt, E.2
  • 57
    • 0027675555 scopus 로고
    • Determination of the interfacial tension by zero creep experiments on multilayers. I. Theory; II. Experiment
    • Josell D, Spaepen F: Determination of the interfacial tension by zero creep experiments on multilayers. I. Theory; II. Experiment Acta Metall Mater 1993, 41:3007-3027.
    • (1993) Acta Metall Mater , vol.41 , pp. 3007-3027
    • Josell, D.1    Spaepen, F.2
  • 58
    • 0026117751 scopus 로고
    • The viscosity of amorphous metallic thin films
    • Wrtvrouw A, Volkert CW, Spaepen F: The viscosity of amorphous metallic thin films. Mat Sci Eng A 1991, 134:1274-1277.
    • (1991) Mat Sci Eng A , vol.134 , pp. 1274-1277
    • Wrtvrouw, A.1    Volkert, C.W.2    Spaepen, F.3
  • 60
    • 0030173939 scopus 로고    scopus 로고
    • Computer simulation of strain energy effects vs surface and interface energy effects on grain growth in thin films
    • Carel R, Thompson CV, Frost HJ: Computer simulation of strain energy effects vs surface and interface energy effects on grain growth in thin films. Acta Mater 1996, 44:2479.
    • (1996) Acta Mater , vol.44 , pp. 2479
    • Carel, R.1    Thompson, C.V.2    Frost, H.J.3
  • 61
    • 0030147755 scopus 로고    scopus 로고
    • Stress and grain growth in thin films
    • Thompson CV, Carel R: Stress and grain growth in thin films. J Mech Phys Sol 1996, 44:657-673. This is the latest review paper from Thompson's group, which contains many references to their earlier work. This issue of the journal contains papers from a conference on the Mechanics and Physics of Layered and Graded Materials, all of which are of interest.
    • (1996) J Mech Phys Sol , vol.44 , pp. 657-673
    • Thompson, C.V.1    Carel, R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.