Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

Proceedings of the Society for Experimental Mechanics, Inc.

Volumn 65, Issue , 2008, Pages 91-106

  Pandey, A K ^a   Pratap, R ^a   Chau, F S ^b  

^a INDIAN INSTITUTE OF SCIENCE   (India)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Experimental result; MEMS; Microfluidics; Quality factor; Squeeze film damping; Torsion motion

Indexed keywords

EID: 78149313898     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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