Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors

Acta Mechanica Sinica/Lixue Xuebao

Volumn 25, Issue 1, 2009, Pages 1-12

  Mutyala, Madhu Santosh Ku ^a   Bandhanadham, Deepika ^a   Pan, Liu ^a   Pendyala, Vijaya Rohini ^a   Ji, Hai Feng ^b  

^a LOUISIANA TECH UNIVERSITY   (United States)

^b DREXEL UNIVERSITY   (United States)

Author keywords

MEMS; Microcantilever; Sensitivity; Sensor

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOASSAY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; MACHINE DESIGN; MEMS; MICROELECTROMECHANICAL DEVICES;

ANALYTICAL TECHNIQUES; ANALYTICAL TOOLS; ELECTRONIC DESIGNS; FAST RESPONSE; FREQUENCY CHANGES; LABEL-FREE; MICRO CANTILEVER SENSORS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROCANTILEVER; PIEZO-RESISTIVE; SENSITIVITY; SENSOR; ULTRASENSITIVE;

SENSORS;

EID: 58149267998     PISSN: 05677718     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10409-008-0222-6     Document Type: Article

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