Electric and ferroelectric properties of PZT/BLT multilayer films prepared by photochemical metal-organic deposition

Applied Surface Science

Volumn 255, Issue 7, 2009, Pages 4197-4200

  Park, Hyeong Ho ^a   Lee, Hong Sub ^a   Park, Hyung Ho ^a   Hill, Ross H ^b   Hwang, Yun Taek ^c  

^a Yonsei University   (South Korea)

^b SIMON FRASER UNIVERSITY   (Canada)

^c Hynix Semiconductor Inc   (South Korea)

Author keywords

BLT; Direct patterning; Fatigue free; Multilayer film; PZT

Indexed keywords

BISMUTH COMPOUNDS; DEPOSITION; FERROELECTRIC CERAMICS; FERROELECTRIC FILMS; FERROELECTRICITY; FILM PREPARATION; LANTHANUM COMPOUNDS; LEAD ZIRCONATE TITANATE; LEAKAGE CURRENTS; MICROMACHINING; MULTILAYERS; ORGANIC POLYMERS; ORGANOMETALLICS; PLATINUM;

DIRECT-PATTERNING; FERROELECTRIC LAYERS; FERROELECTRIC PROPERTY; INTERMEDIATE LAYERS; ORDERS OF MAGNITUDE; PHOTOCHEMICAL METAL-ORGANIC DEPOSITION; PHOTOSENSITIVE PRECURSORS; REMNANT POLARIZATIONS;

MULTILAYER FILMS;

EID: 58149098725     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.11.011     Document Type: Article

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