Effect of bismuth excess on the crystallization of Bi3.25La 0.75Ti3O12 thin films on Pt/Ti/SiO 2/Si substrates

Microelectronic Engineering

Volumn 71, Issue 3-4, 2004, Pages 266-271

  Kim, Kyoung Tae ^a   Kim, Chang Il ^a  

^a Chung Ang University   (South Korea)

Author keywords

BLT; FeRAM; Ferroelectric properties; MOD; Thin film

Indexed keywords

BISMUTH; CRYSTALLIZATION; FERROELECTRICITY; ORGANOMETALLICS; PERMITTIVITY; PEROVSKITE; SILICA; SUBSTRATES; THIN FILMS;

BLT; FERAM; MOD;

MICROELECTRONICS;

EID: 1842740752     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.01.034     Document Type: Article

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