Electrical properties of PLZT thin films formed by photochemical metal-organic deposition with various Zr/Ti ratios

Journal of Electroceramics

Volumn 17, Issue 2-4, 2006, Pages 135-139

  Park, Hyeong Ho ^a   Park, Hyung Ho ^a   Hill, Ross H ^b  

^a Yonsei University   (South Korea)

^b SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Direct patterning; MPB composition; Photochemical reaction; PLZT; UV exposure

Indexed keywords

DEPOSITION; ELECTRIC PROPERTIES; LANTHANUM; LEAD COMPOUNDS; PHOTOCHEMICAL REACTIONS; SEMICONDUCTOR DOPING; SUBSTITUTION REACTIONS;

DIRECT-PATTERNING; MORPHOTROPIC PHASE BOUNDARY COMPOSITION; ULTRAVIOLET EXPOSURE;

THIN FILMS;

EID: 33847242226     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-006-8314-9     Document Type: Conference Paper

References (20)

1. R. Singh, S. Alamgir, and R. Sharangpani, Appl. Phys. Lett., 67, 3939 (1995).
2. J.K. Lee, T. Kim, I. Chung, and S.B. Desu, Appl. Phys. Lett., 75, 334 (1999).
3. C.L.W. Ching and R.H. Hill, J. Vac. Sci. Technol., A.16, 897 (1998).
4. C. Sudhama, J. Kim, J. Lee, V. Chikarmane, W. Shepherd, and E.R. Myers, J. Vac. Sci. Technol., B11(4), 1302 (1993).
5. H.D. Chen, K.R. Udayakumar, C.J. Gaskey, and L.E. Cross, Appl. Phys. Lett., 67, 3411 (1995).
6. S.B. Krupanidhi, H. Hu, and V. Kumar, J. Appl. Phys., 71(1), 376 (1992).
7. H.-H. Park, W.S. Kim, J.-K. Yang, H.-H. Park, and R.H. Hill, Microelectron. Eng., 71, 215 (2004).
8. R.C. Evans, An Introduction to Crystal Chemistry (Cambridge Univ. press, London, 1966), p. 38.
9. K. Lee and S. Baik, Appl. Phys. Lett., 86, 202901 (2005).
10. S.H. Oh and H.M. Jang, Phys. Rev., B62, 14757 (2000).
11. G.H. Haertling and C.E. Land, J. Am. Ceram. Soc., 54, 1 (1971).
12. Y. Honda, S. Yokoyama, H. Funakubo, and K. Saito, Mater. Sci. Eng. B, 120, 161 (2005).
13. T. Ikeda, J. Phys. Soc. Japan, 14, 1290 (1959).
14. H.-H. Park, S. Yoon, H.-H. Park, and R.H. Hill, Thin Solid Films, 447-448, 669 (2004).
15. C.K. Kwok and S.B. Desu, J. Mater. Res., 8, 339 (1993).
16. B.D. Cullity, Elements of X-ray Diffraction (Addison-Wesley Pub. Co., Notre Dame, 1978), p. 127.
17. H. Hu and S.B. Krupanidhi, J. Mater. Res., 9, 1484 (1994).
18. S.H. Hu, C.J. Hu, X.J. Meng, G.S. Wang, J.L. Sun, S.L. Guo, J.H. Chu, and N. Dai, J. Cryst. Growth, 260, 109 (2004).
19. J.-K. Yang, W.S. Kim, and H.-H. Park, Appl. Surf. Sci., 169-170, 544 (2001).
20. H.B. Sharma, H.N.K. Sarma, and A. Mansingh, J. Appl. Phys., 85, 341 (1999).