Fabrication and electromechanical properties of a self-actuating Pb (Zr0.52 Ti0.48) O3 microcantilever using a direct patternable sol-gel method

Applied Physics Letters

Volumn 88, Issue 4, 2006, Pages 1-3

  Kang, Ghi Yuun ^a,b   Bae, Sang Woo ^a   Park, Hyung Ho ^a   Kim, Tae Song ^b  

^a Yonsei University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; GOLD; MICROELECTROMECHANICAL DEVICES; PHOTOSENSITIVITY; SOL-GELS; THIN FILMS;

ELECTROMECHANICAL PROPERTIES; MICRODETECTION SYSTEMS;

LEAD COMPOUNDS;

EID: 31544449753     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2168261     Document Type: Article

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