Variable-focusing microlens with microfluidic chip

Journal of Micromechanics and Microengineering

Volumn 14, Issue 5, 2004, Pages 675-680

  Chen, Jackie ^a   Wang, Weisong ^a   Fang, Ji ^a   Varahramyan, Kody ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DIAPHRAGMS; ELECTROLYTES; GLASS; LIQUID CRYSTALS; MICROLENSES; OPTICAL SYSTEMS; PHOTORESISTS; POLYMERS; REACTIVE ION ETCHING; SURFACE ROUGHNESS;

DIMENSION CONTROL; FOCAL LENGTH; MICROFLUIDIC CHIPS; POLYMER MICROLENSES;

MICROPROCESSOR CHIPS;

EID: 2542451762     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/5/003     Document Type: Article

References (15)

1. Kaneko T, Ohmi T, Ohya N, Kawahara N and Hattori T 1997 A new, compact and quick-response dynamic focusing lens Transducers '97: Proc. 9th Int. Conf. on Solid State Sensors and Actuators pp 63-6
2. Sato M, Shimokawa F, Makihara M and Nishida Y 1997 Two types of thermo-capillary optical switches Tech. Digest MOEMS97 pp 238-42
3. Commander L G, Day S E, Chia C H and Selviah D R 1995 Microlenses immersed in nematic liquid crystal with electrically controllable focal length EOS Topical Digest Meetings Microlens Arrays vol 5, pp 72-6
4. Sato S 1999 Application of liquid crystals to variable-focusing lenses Opt. Rev. 6 471-85
5. Kwon S and Lee L P 2001 Focal length by microfabricated planar electrodes-based liquid lens (μPELL) 11th Int. Conf. on Solid-State Sensors and Actuators (Munich, Germany, 10-14 June 2001)
6. Berge B and Peseux J 2000 Variable focal lens controlled by an external voltage: an application of electrowetting Eur. Phys. J. E 3 159-63
7. Ahn S-H and Kim Y-K 1999 Proposal of human eye's crystalline lens-like variable focusing lens Sensors Actuators A 78 48-53
8. Seven M and Mottier P 1999 Etching selectivity control during resist pattern transfer into silica for the fabrication of microlenses with reduced spherical aberration Opt. Eng. 38 146-50
9. Iga I, Kokubun Y and Oikawa M 1984 Fundamentals of Microoptics (London: Academic)
10. Kufner M and Kufner S 1996 Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation Microsyst. Technol. 2 114-8
11. Fu Y Q and Bryan N K A 2001 Novel one-step method of microlens mold array fabrication Opt. Eng. 40 1433-4
12. Daly D J 1998 The fabrication and measurement of melted photoresist microlenses Doctoral Thesis Kings College London, UK
13. Popovic Z D, Sprague R A and Connell GAN 1988 Technique for monolytic fabrication of microlens arrays Appl. Opt. 27 1281-8
14. O'Neill F T and Sheridan J T 2002 Photoresist reflow method of microlens production: I. Backgraound and experiments Optik 113 391-404
15. Jeong K H and Lee L P 2002 A new method of increasing numerical aperture of microlens for biophotonic MEMS 2nd Ann. Int. IEEE-EMBS Special Topic Conf. on Microtechnologies in Medicine & Biology (Madison, WI, USA, 2-4 May 2002) pp 380-3