A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1681-1686

  Lee, Hyung Kew ^a   Chang, Sun Il ^a   Yoon, Euisik ^a  

^a University of Minnesota   (United States)

Author keywords

Capacitive sensor; Expandable scheme; Flexible polymer; Modular structure; Tactile sensor

Indexed keywords

ELASTOMERS; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS;

CAPACITIVE SENSOR; FLEXIBLE POLYMER; TACTILE SENSOR;

MICROSENSORS;

EID: 33845517787     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.886021     Document Type: Article

References (20)

1. M. E. H. Eltaib and J. R. Hewit, "Tactile sensing technology for minimal access surgery - A review," Mechatronics, vol. 13, pp. 1163-1177, 2003.
2. M. H. Lee and H. R. Nicholls, "Tactile sensing for mechatronics - A state of art survey," Mechatronics, vol. 9, pp. 1-31, 1999.
3. M. Ibana, Y. Hoshino, K. Nagasaka, T. Ninomiya, S. Kagami, and H. Inoue, "A full-body tactile sensor suit using electrically conductive fabric and strings," in Proc. 1996 IEEE/RSJ Int. Conf. Intell. Robots Syst. '96, vol. 2, pp. 450-457.
4. M. Sergio, N. Manaresi, M. Tartagni, R. Guerrieri, and R. Canegallo, "A textile based capacitive pressure sensor," Proc. IEEE Sensors, vol. 2, no. 12-14, pp. 1625-1630, Jun. 2002.
5. H. Zhang and E. So, "Hybrid resistive tactile sensing," IEEE Trans. Syst., Man, Cybern. B, Cybern., vol. 32, no. 1, pp. 57-65, 2002.
6. M. Shimojo, A. Namiki, M. Ishikawa, R. Makino, and K. Mabuchi, "A tactile sensor sheet using pressure conductive rubber with electrical-wires stitched method," IEEE Sensors J., vol. 4, pp. 589-595, Oct. 2004.
7. R. Lazzarini, R. Magni, and P. Dario, "A tactile array sensor layered in an artificial skin," in Proc. 1995 IEEE/RSJ Int. Conf. Intell. Robots Syst. '95, vol. 3, pp. 114-119.
8. T. V. Papakostas, J. Lima, and M. Lowe, "A large area force sensor for smart skin applications," Proc. IEEE Sensors, vol. 2, no. 12-14, pp. 1620-1624, Jun. 2002.
9. H. Kawaguchi, T. Someya, T. Sekitani, and T. Sakurai, "Cut-and-paste customization of organic FET integrated circuit and its application to electronic artificial skin," IEEE J. Solid-State Circuits, vol. 40, pp. 177-185, Jan. 2005.
10. T. Salo, K.-U. Kirstein, J. Šedivý, J. Grünenfelder, T. Vancura, G. Zünd, and H. Baltes, "Continuous blood pressure monitoring utilizing a CMOS tactile sensor," in Proc. 26th Annu. Int. Conf. IEEE EMBS, 2004, pp. 2326-2329.
11. B. J. Kane, M. R. Cutkosky, and G. T. A. Kovacs, "A traction stress sensor array for use in high-resolution robotic tactile imaging," IEEE J. Microelectromech. Syst., vol. 9, no. 4, Dec. 2000.
12. T. Mei, W. J. Li, Y. Ge, Y. Chen, L. Ni, and M. H. Chan, "An integrated MEMS three-dimensional tactile sensor with large force range," Sens. Actuators A, vol. 80, pp. 155-162, 2000.
13. H. Takao, K. Sawada, and M. Ishida, "Silicon smart tactile image sensor with pneumatically swollen single diaphragm structure," in 17th IEEE Int. Conf. Micro Electro Mech. Syst., 2004, pp. 846-849.
14. J. Engel, J. Chen, and C. Liu, "Development of polyimide flexible tactile sensor skin," J. Micromech. Microeng., vol. 13, pp. 359-366, 2003.
15. M. Ohka, H. Kobayashi, and Y. Mitsuya, "Sensing characteristics of an optical three-axis tactile sensor mounted on a multi-fingered robotic hand," in Proc. 2005 IEEE/RSJ Int. Conf. Intell. Robots Syst., 2005, pp. 1959-1964.
16. N. Futai, N. Futai, K. Matsumoto, and I. Shimoyama, "A flexible micromachined planar inductor for use as an artificial tactile mechanoreceptor," Sens. Actuators A, vol. 111, pp. 293-303, 2004.
17. G. M. Krishna and K. Rajanna, "Tactile sensor based on piezoelectric resonance," IEEE Sensors J., vol. 4, Oct. 2004.
18. H.-K. Lee, S.-I. Chang, K.-H. Kim, S.-J. Kim, K.-S. Yun, and E. Yoon, "A modular expandable tactile sensor using flexible polymer," in Proc. 18th Int. Conf. Micro Electro Mech. Syst., 2005, pp. 642-645.
19. B.-H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, "Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer," IEEE J. Microelectromech. Syst., vol. 9, no. 1, pp. 76-81, 2000.
20. J. Garra, T. Long, T. Shneider, R. White, and M. Paranjape, "Dry etching of polydimethylsiloxane for microfluidic systems," J. Vacuum Sci. Technol. A: Vacuum, Surfaces, Films, vol. 20, pp. 975-982, 2002.