Tunable, membrane-based, pneumatic micro-mirrors

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 7, 2006, Pages

  Werber, A ^a   Zappe, H ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Micro fluidics; Micro mirrors; Pneumatics; Tunable optics

Indexed keywords

ELASTOMERS; ETCHING; PNEUMATIC CONTROL; SPIN COATING; TUNING; VOLTAGE CONTROL;

DEFLECTION ANGLE; MICRO-MIRRORS; PNEUMATIC PRESSURE; PNEUMATICS; SILICON SUBSTRATE; TUNABLE OPTICS;

MIRRORS;

EID: 33745183766     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/7/S03     Document Type: Article

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