Polydimethylsiloxane as an elastic material applied in a capacitive accelerometer

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 52-54

  Lötters, Joost C ^a   Olthuis, Wouter ^a   Veltink, Peter H ^a   Bergveld, Piet ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; GLASS TRANSITION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SILICONES; THERMAL EFFECTS; THERMODYNAMIC STABILITY;

POLYDIMETHYLSILOXANE (PDS);

ACCELEROMETERS;

EID: 0030091391     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/010     Document Type: Article

References (4)

1. ABCR 1994/1995 Research Chemicals and Metals (Karlsruhe: ABCR)
2. Seidel H, Riedel H, Kolbeck R, Mück G, Kupke W and Königer M 1990 Capacitive silicon accelerometer with highly symmetrical design Sensors Actuators A 21-23 312-215
3. van Krevelen D W and Hoftyzer P J 1976 Properties of Polymers (Amsterdam: Elsevier)
4. Treloar LRG 1975 The Physics of Rubber Elasticity (Oxford: Clarendon)