SCOPUS 정보 검색 플랫폼

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 120-123

Adaptive fluidic PDMS-lens with integrated piezoelectric actuator

(5) Schneider, F a Eberhard, D b Strohmeier, D b Muller C a Wallrabe, U a

a UNIVERSITY OF FREIBURG (Germany)

b FRAUNHOFER INSTITUTE FOR PHYSICAL MEASUREMENT TECHNIQUES IPM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROCHANNELS; MICROELECTROMECHANICAL DEVICES; NANOFLUIDICS; NONMETALS; OPTICAL DESIGN; OPTICAL INSTRUMENTS; OXYGEN; PHOTORESISTS; PIEZOELECTRICITY; REACTIVE ION ETCHING;

FABRICATION PROCESSES; FOCAL LENGTHS; HOT EMBOSSING; INTERNATIONAL CONFERENCES; LENS SYSTEMS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-FLUIDIC; OPTIMUM THICKNESS; OXYGEN BONDING; PIEZO ACTUATOR; PIEZOELECTRIC PUMPING;

LENSES;

EID: 50149109888 PISSN: 10846999 EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2008.4443607 Document Type: Conference Paper

Times cited : (15)

References (6)

1
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- D. Y. Zhang, N. Justis, Y. H. Lo,"Fluidic Zoom-Lens-on-a-Chip With Wide Field-of-View Tuning Range", IEEE Photonic. Tech. L., vol. 16, pp. 2356-2358, 2004.
- (2004) IEEE Photonic. Tech. L , vol.16 , pp. 2356-2358
- Zhang, D.Y.¹ Justis, N.² Lo, Y.H.³

2
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- Variable focal lens controlled by an external voltage: An application of electrowetting
- B. Berge, J. Peseux, "Variable focal lens controlled by an external voltage: an application of electrowetting", Eur. Phys. J. E, vol. 3 , pp. 159-163, 2000.
- (2000) Eur. Phys. J. E , vol.3 , pp. 159-163
- Berge, B.¹ Peseux, J.²

3
- 48049091992
- F. Schneider, C. Müller, U. Wallrabe 2007, Low Cost Adaptive Silicone Membrane Lens, Proc. IEEE/LEOS Int. Conf. Optical MEMS 2007, Hualien/Taiwan , August 12-16, 2007, pp. 145-146.
- F. Schneider, C. Müller, U. Wallrabe 2007, "Low Cost Adaptive Silicone Membrane Lens", Proc. IEEE/LEOS Int. Conf. Optical MEMS 2007, Hualien/Taiwan , August 12-16, 2007, pp. 145-146.

4
- 43049109731
- Miniaturized Electromagnetic Ferrofluid Actuator
- Bremen/Germany, June 14-16
- F. Schneider, D. Hohlfeld, U. Wallrabe,"Miniaturized Electromagnetic Ferrofluid Actuator", Proc. 10th Int. Conf. New Actuators 2006, Bremen/Germany, June 14-16, 2006, pp. 289-292.
- (2006) Proc. 10th Int. Conf. New Actuators 2006 , pp. 289-292
- Schneider, F.¹ Hohlfeld, D.² Wallrabe, U.³

5
- 22444435567
- S. Bhattacharya, A. Datta, J. M. Berg, S. Gangopadhyay, J. Microelectromech. Syst., vol. 14, pp. 590-597, 2005.
- (2005) J. Microelectromech. Syst , vol.14 , pp. 590-597
- Bhattacharya, S.¹ Datta, A.² Berg, J.M.³ Gangopadhyay, S.⁴

6
- 84889479970
- John Wiley & Sons Ltd, Chichester
- J. L. Pons, Emerging Actuator Technologies: A Micromechatronic Approach, John Wiley & Sons Ltd, Chichester, 2005.
- (2005) Emerging Actuator Technologies: A Micromechatronic Approach
- Pons, J.L.¹

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